MEMS, Field-Emitter, Thermal, and Fluidic Devices
نویسندگان
چکیده
منابع مشابه
Biomedical Applications of Mems
Micromachining and MEMS technologies can be used to produce complex electrical, mechanical, fluidic, thermal, optical, and magnetic structures, devices, and systems on a scale ranging from organs to subcellular organelles. This miniaturization ability has enabled MEMS to be applied in many areas of biology, medicine, and biomedical engineering – a field generally referred to as BioMEMS. The fut...
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